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The University of Virginia Microelectronics Lab Case Study

The University of Virginia Microfabrication Laboratories (UMVL) serve as the University’s center for research in devices, circuits, microsystems, materials and processing methods.  The 10,000 sf facility supports three UVA Schools (SEAS, A&S, and Medicine) in multidisciplinary research and educational activities and trains its students in research methods and skills with high value in the wider economy.

While maintaining UVML operations, SMRT upgraded and renovated the existing ISO 6, 7 and 8 cleanrooms and a BSL-2 bioengineering/interdisciplinary lab within the University’s Medical School. A Hazardous Process Materials and Waste Handling area was constructed, and cleanroom renovations included Photolithography, Wet Processing, CVD, Sputtering, Etching and Characterization.  Support spaces include a new centralized gowning area, lab entrance, conference room, imaging suite and collaboration space.