Confidential Client – Microelectronics Facility

SMRT was retained to provide master planning, process equipment (tool) planning, design, engineering and construction administration services to move and consolidate 65 laboratories into a new 165,000 square-foot state-of-the-art Compound Semiconductor Integration Facility, including approximately 35,000 square feet of ISO-4 and ISO 6 space under the filter at the fabrication level.

The facility also includes a fan deck and sub-fab. Special consideration was given to vibration mitigation, acoustic and EMI requirements, as well as move logistics for more than 300 primary tools and more than twice that count of associated support assets. 

Tool set complexity ranged from bench-top plug-in to highly specialized, complex and custom growth, etch and deposition tools.

In addition to process equipment layout and equipment relocation, SMRT determined and engineered complex utility requirements and connections.

The client develops advanced technologies, applied to some of the country’s most complex national security challenges.