Confidential Government-Funded Research Client
SMRT was hired to offer master planning, process equipment (tool) planning, design, engineering, and construction administration services. The project objective was to move and consolidate 65 laboratories into a new state-of-the-art Compound Semiconductor Integration Facility spanning 165,000 square feet. The facility includes approximately 35,000 square feet of ISO-4 and ISO-6 space under the filter at the fabrication level.
The facility includes a fan deck and sub-fab, with special consideration given to vibration mitigation, acoustic, EMI requirements, and move logistics for more than 300 primary tools and more than twice that count of associated support assets.
Tool set complexity ranged from bench-top plug-ins to highly specialized, complex, and custom growth, etch, and deposition tools.
In addition to equipment layout and relocation, SMRT engineered complex utility requirements and connections.
The client develops advanced technologies for the country’s most complex national security challenges.